Rates & Fees

To set up an external academic account, please contact Alicia Reed of KUCR at amreed@ku.edu.

To set up an external market account, please contact the Industry Contracts office at indcontracts@ku.edu.


Hourly Rates

All hourly rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum.

General Cleanroom Access Rates:

Internal Academic External Academic External Market
$12 / hour $19 / hour NA

 

This rate is applied per user to all time spent in the cleanroom, in addition to any other applicable hourly rates and fees accrued while working in the cleanroom facility. This rate does not apply to time spent in the machine shop or support space. The cleanroom is not currently accessible to private industry users.

Equipment Usage Rates:

  Internal Academic External Academic External Market
Lesker Sputterer $15 / hour $24 / hour $45 / hour
E-Beam Evaporator $15 / hour $24 / hour $45 / hour
Oxford PECVD * $35 / hour $55 / hour $105 / hour
Oxford ICP-RIE * $35 / hour $55 / hour $105 / hour
Horiba Ellipsometer $15 / hour $24 / hour $45 / hour
Amray SEM $20 / hour $32 / hour $60 / hour

 

The rates above are applied in addition to the general access rate and other fees accrued. Additional consumables costs may also apply (see below.) Hour meters are installed in each piece of equipment for accurate usage reporting.

* — In addition to process time, three hours of instrument time will be added for startup and shutdown.

Labor Rates:

Internal Academic External Academic External Market
$27 / hour $43 / hour $81 / hour

This rate applies to all labor provided by facility staff, including orientation, training, fabrication, assistance and/or any other related service. This rate will be applied in addition to any applicable rates and fees as required by the labor provided.


Usage Fees

Equipment and Facility Per-Use Fees:

  Internal Academic External Academic External Market
Photolithography Room $8 $13 $24
Profilometer $10 $16 $30
Denton Sputterer $15 $24 $45
CO2 LASER Engraver $5 $8 $15
COMSOL Metaphysics Software $10 $16 $30
CNC Milling Machine $10 $16 $30

The non-hourly usage fees above are charged once per day per user, and may be applied in addition to applicable hourly rates and consumables costs. Uses are tabulated from log books or log-in mechanisms. The CNC machine is not currently accessible to any user; only the director may operate the CNC machine.

Consumables Costs:

Category Material Cost Unit
Photolithography SU8 Photoresist $1.00 per gram
  SU8 Developer $0.05 per gram
  AZ 1518 Photoresist $0.30 per gram
  AZ 300 MIF Developer $0.01 per gram
  AZ 9260 Photoresist $0.85 per gram
  AZ 400K Developer $0.02 per gram
  1165 Microposit Remover $0.06 per gram
  4" Silicon Wafer (P100) $11.00 each
  4" Quartz Glass Plate — Chrome and Photoresist Coated $105.00 each
  4" Borosilicate Glass Plate — Chrome and Photoresist Coated $31.00 each
  4" Borosilicate Glass Plate — Blank $14.50 each
  4" Soda Lime Glass Plate — Chrome and Photoresist Coated $15.50 each
  4" Soda Lime Glass Plate — Blank $7.50 each
Metal Deposition Gold MKT per ounce
  Platinum MKT per ounce
  Palladium MKT per ounce
3-D Printing ABS Plastic Filament $5.50 per in.3
  Soluble Support $5.50 per in.3
  Model Base $3.50 each
  Cleaning Solution $5.00 per object
Soft Lithography Polydimethylsiloxane (PDMS) $0.10 per gram
Miscellaneous Cleanroom Notebooks $13.00 each

The above consumables are provided to cleanroom users at cost. Scales are provided to record material weights. Precious metal prices are determined at the time of use; market rates are provided by NASDAQ. Additional materials can be acquired and provided at user request. Prices are subject to change without notice.

For any questions regarding rates, fees or billing, contact Ryan Grigsby by email, or call 785-864-1918.


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