Microfabrication photo

The Adams Microfabrication Facility, located on the first floor of the Multidisciplinary Research Building on KU's west campus, consists of 2,000 ft2 of cleanroom space, 550 ft2 of “dirty” space for manufacturing and machining, and 300 ft2 of office space. The facility provides capabilities for photolithography, nano-imprint lithography, plasma (dry) etching, wet etching, metal and dielectric material thin film deposition, electron microscopy, ellipsometry, device characterization, laser ablation and engraving, 3D printing, hot embossing, and CNC machining. In addition, the facility has numerous microscopes for general inspection, ovens and furnaces, a dedicated gas storage room with safety cabinets, 4N house nitrogen in each room, ultrapure water, dedicated process fume hoods and filtered lighting for photolithography.

This facility is under the direction of Drs. Susan Lunte and Karen Nordheden. Services and usage of the facility are available to researchers from all Kansas universities. Training is provided to new investigators and graduate students in the use of microfabrication procedures and equipment. In addition, researchers from both non-Kansas academic and private industry institutions may contract with the facility for consultation and services. For more information, please contact the facility director, Ryan Grigsby, by email or by phone at 785-864-1918.

Briefly, the microfabrication facility cleanroom suite consists of:

  • Class 7 Gowning Vestibule
  • Class 5 Photolithography Room with a UV flood source and mask aligner, a spin coater, two 10" hot plates, an HMDS vacuum oven, and a gravity oven
  • Class 5 Evaluation Room with an SEM, ellipsometer, probe station and a camera-equipped microscope
  • Class 6 Deposition Room with sputterers, e-beam evaporator, PECVD and a plasma cleaner
  • Class 6 room for Plasma Etching and Nano-Imprint Lithography
  • Class 6 Wet Lab with chemical storage, ultrapure water, 2D profilometer, plasma reactor, ovens and furnaces, microscopes, four fume hoods and a Class 5 device assembly area
  • Class 7 Mechanical Room with compressed gas storage and equipment roughing pumps
  • Manufacturing Space (non-controlled environment) with hot embossing equipment and a CNC mill
  • Machine Shop (non-controlled environment) with a 3-D printer, CO2 engraver, drill press, table saw, band saw, solder station, media blasting station and a Work Bench with a basic assortment of hand tools

Select the Equipment tab above for details on the available fabrication equipment in the cleanroom and support spaces. Select the Rates & Fees tab for an explanation of hourly rates and billing. Select the Resources tab for SOPs, Equipment Manuals, Datasheets and Links. Select the Galleries tab to virtually explore the facility. Select the Contact tab to find information on our staff and location, or to submit a Service Request.


CMADP Upcoming Events

Special seminar by Dr. James P. Landers
Commonwealth Professor in Chemistry,
Mechanical Engineering & Pathology
University of Virginia

Wednesday, May 17, 2017 at 3:00pm
Simons Auditorium, HBC, West Campus

"Integrated Microfluidic Systems for Forensic DNA Analysis"
In 2006, we demonstrated that microfluidic technology could provide a ‘lab-on-a-chip’ solution for real-world genetic analysis. Sample-in/answer-out functionality was shown for the detection of bacteria in mouse blood and in a human nasal swab, with a sub-30 minute analytical time for DNA extraction, amplification, electrophoretic separation and detection. We extrapolated these technology developments to the analysis of short tandem repeats (STR) in human DNA; these clinically-insignificant (presumably) tetranucleotide sequences function effectively for statistically-relevant matching in human identification. Our efforts led to the development of a commercializable system designed for implementation in crime labs for STR profiling convicted felons or, in some states, profiling arrestees in booking stations. An intricate but functional microfluidic architecture allowed sample-to-profile to be achieved from a cheek swab in less than 80 minutes, using nanoliter flow control, infrared thermocycling and rapid electrophoretic separation of DNA with 5-color fluorescence detection. We have since demonstrated the fabrication of hybrid microdevices composed of inexpensive polymeric materials, many of these commercial-off-the-shelf. We have designed, built and functionalized fully-integrated DNA analysis chemistry/microfluidics on a rotationally-driven system the size of a compact disc. With this system, DNA can be extracted from a swab, PCR amplified to generate an abundance of DNA fragments of the STR loci, followed by resolution of those fragments in a separation in a 4 cm Leff channel that is complete in <300 sec with a 2-base resolution. The processes that allow for swab in–profile out microfluidics are carried out on an instrument that can be carried in one hand and weighs ~14 lbs, ultimately allowing for facile rapid human identification/screening in the field.
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