|Quorum Q150R ES Sputter Coater|
The Q150R ES is a combination sputter coating and carbon/metal evaporation tool. Interchangeable inserts are provided for each process. It is used to prepare SEM samples for imaging.
A deposition monitor is installed to provide accurate film thicknesses of sputtered materials.
The sputter head is currently fitted with a Gold/Palladium (60:40) target.