Core Research Resource Lab
Quorum Q150R ES Sputter Coater

The Q150R ES is a combination sputter coating and carbon/metal evaporation tool. Interchangeable inserts are provided for each process. It is used to prepare SEM samples for imaging.

A deposition monitor is installed to provide accurate film thicknesses of sputtered materials.

The sputter head is currently fitted with a Gold/Palladium (60:40) target.


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