Core Research Resource Lab
Yield Engineering YES-310TA HMDS Oven

HMDS Oven

The YES-310TA is a vacuum oven, specifically designed to coat substrates with HMDS (hexamethyldisilazane) for improved photoresist adhesion.

While capable of also functioning as a photoresist image reversal oven, the YES-310TA is not currently plumbed with the requisite ammonia gas. This capability may be added in the future.

To reserve the Photolithography Room, click here.


CMADP Upcoming Events

Analytical Chemistry Seminar
KU Chemistry Dept. (co-sponsored by COBRE CMADP)

Nathan A. Lacher, Ph.D.
Associate Research Fellow, Group Leader
Analytical R&D, Pfizer Inc.

"Development of Conjugate Vaccines at Pfizer"
Monday, February 17, 2020 at 3:30pm
Simons Auditorium, HBC, West Campus

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