Core Research Resource Lab
Thermionics VE-100 E-Beam Evaporator

Thermionics VE-100 E-Beam Evaporator


The VE-100 e-beam evaporator non-conformally deposits thin films of virtually any material using one of three, 3 kW electron beam sources in a low temperature environment. The instrument is equipped with a 12" by 18" bell jar, with a 12" collar with multiple accessory ports. Deposition rate is controlled using an Inficon XTC quartz crystal monitor system.

Matials currently available for use:

  • Cerium(IV) Oxide
  • Cobatl
  • Gold
  • Iron
  • Nickel
  • Palladium
  • Silver
  • Strontium Fluoride

CMADP Upcoming Events


KU Today