Photolithography Room

The Photolithography Room is home to the ABM UV Flood Source and Mask Alignment System, the Yield Engineering YES-310TA HMDS Oven, the Brewer Science Cee 200CBX Spin Coater, and the Blue M Stabil-Therm Oven.

To reserve the Photolithography Room, click here.


CMADP Upcoming Events

Ralph N. Adams Lectureship
KU Chemistry Dept.
Friday, September 6, 2019

Robert Kennedy, Ph.D.
Hobart H. Willard Distinguished University Professor
Chair and Professor of Chemistry
Professor of Pharmacology
University of Michigan

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