|Tencor Alpha-Step 200 Profilometer|
The Alpha-Step 200 is a 2D stylus profilometer with 5 Å vertical resolution in kÅ mode and 5 nm resolution in micron mode. Scan lengths can be manually set from 10 µm to 10 mm, with slow and fast scan rates. The horizontal resolution is 40 nm. This instrument is currently equipped with a 5 micron stylus (60°). The tracking force is currently set to 8 mg.