Profilometers


Tencor Alpha-Step 200 Profilometer

Tencor Profilometer

The Alpha-Step 200 is a 2D stylus profilometer with 5 Å vertical resolution in kÅ mode and 5 nm resolution in micron mode. Scan lengths can be manually set from 10 µm to 10 mm, with slow and fast scan rates. The horizontal resolution is 40 nm. This instrument is currently equipped with a 5 micron stylus (60°). The tracking force is currently set to 8 mg. A manual leveling function is available. Surface roughness data is provided with each scan. Video output is connected to a computer for data collection.


Dektak IIa Profilometer

Dektak Profilometer

The Dektak IIa is a 2D stylus profilometer with 5 Å vertical resolution. Scan lengths can be manually set from 50 µm to 30 mm, with slow, medium and fast scan rates. The horizontal resolution is 50 nm to 50 µm, depending on scan length and rate. This instrument is currently equipped with a 12.5 micron stylus (45°). The tracking force is currently set to 15 mg. Manual and automatic leveling functions are available. Surface roughness data and area-under-the-curve can be calculated.


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