Plasma Reactors


March Instruments Plasmod Plasma Reactor

March Instruments Plasmod Plasma Reactor

The March Plasmod is used to clean substrates prior to film deposition or to etch shallow features in various materials. This plasma cleaner is currently plumbed to strike either oxygen or air plasmas.


Harrick PDC-32G Plasma Cleaner

Harrick Plasma Cleaner

The Harrick plasma cleaner, like the March Plasmod above, can be used to etch or clean various materials. This unit is used particularly to treat PDMS devices for irreversible sealing and to clean glass prior to thermal bonding. It is currently plumbed to strike air plasma only.


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