Yield Engineering YES-310TA HMDS Oven

HMDS Oven

The YES-310TA is a vacuum oven, specifically designed to coat substrates with HMDS (hexamethyldisilazane) for improved photoresist adhesion.

While capable of also functioning as a photoresist image reversal oven, the YES-310TA is not currently plumbed with the requisite ammonia gas. This capability may be added in the future.

To reserve the Photolithography Room, click here.


CMADP Upcoming Events

Ralph N. Adams Lectureship, KU Chemistry Dept.

R. Mark Wightman, Ph.D.
Professor Emeritus of Chemistry
University of North Carolina, Chapel Hill

Public Lecture "Detecting Catecholamines--A Journey from Beaker to the Behaving Brain"
Thursday, November 15 @ 4:00pm
Integrated Science Building, Room 1154 (Central District)
Reception immediately following lecture in ISB atrium, open to all

Scientific Lecture "Chemical Monitoring of Neurotransmission with Microelectrodes"
Friday, November 16 @ 4:00pm
Integrated Science Building, Room 1154 (Central District)

KU Today