Yield Engineering YES-310TA HMDS Oven

HMDS Oven

The YES-310TA is a vacuum oven, specifically designed to coat substrates with HMDS (hexamethyldisilazane) for improved photoresist adhesion.

While capable of also functioning as a photoresist image reversal oven, the YES-310TA is not currently plumbed with the requisite ammonia gas. This capability may be added in the future.

To reserve the Photolithography Room, click here.


CMADP Upcoming Events

Analytical Chemistry Seminar
KU Chemistry Dept. (co-sponsored by COBRE CMADP)

Meredith Hartley, Ph.D.
Assistant Professor of Chemistry (Spring 2020)
University of Kansas

"Lipids, hormones, and myelin disease: characterizing connections and therapeutic utility"
Monday, October 28, 2019 at 3:30pm
Simons Auditorium, HBC, West Campus

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