|Yield Engineering YES-310TA HMDS Oven|
The YES-310TA is a vacuum oven, specifically designed to coat substrates with HMDS (hexamethyldisilazane) for improved photoresist adhesion.
While capable of also functioning as a photoresist image reversal oven, the YES-310TA is not currently plumbed with the requisite ammonia gas. This capability may be added in the future.
To reserve the HDMS Oven located in the Photolithography Room, click here.