ABM UV Flood Source and Mask Alignment System

ABM Flood Source

The ABM, Inc. i-line (365 nm) near-UV flood source produces light with an intensity of 21 mW/cm2, with wavelengths below 350 nm being filtered out. This instrument features automatic exposure timing down to 0.1 s, and stage adjustments (x, y, z, and Θ) with 12 μm precision. The mounted microscope uses filtered illumination, and is equipped with 5X, 10X, 20X (LWD) and 40X (LWD) objectives.

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