Thin-Film Deposition Room

The Thin-Film Deposition Room is home to the Thermionics VE-100 E-Beam Evaporator, the Oxford Instruments Plasmalab 80 Plus PECVD, the Kurt J. Lesker AXXIS DC Magnetron Sputterer, the March Instruments Plasmod Plasma Reactor, and the Denton Desk II Sputter Coater.


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